JPS6412363U - - Google Patents
Info
- Publication number
- JPS6412363U JPS6412363U JP10674087U JP10674087U JPS6412363U JP S6412363 U JPS6412363 U JP S6412363U JP 10674087 U JP10674087 U JP 10674087U JP 10674087 U JP10674087 U JP 10674087U JP S6412363 U JPS6412363 U JP S6412363U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- introduction tube
- oven
- metal vapor
- source chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 7
- 239000007787 solid Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10674087U JPS6412363U (en]) | 1987-07-11 | 1987-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10674087U JPS6412363U (en]) | 1987-07-11 | 1987-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6412363U true JPS6412363U (en]) | 1989-01-23 |
Family
ID=31340524
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10674087U Pending JPS6412363U (en]) | 1987-07-11 | 1987-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6412363U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2016046939A1 (ja) * | 2014-09-25 | 2017-04-27 | 三菱電機株式会社 | イオン注入装置 |
-
1987
- 1987-07-11 JP JP10674087U patent/JPS6412363U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2016046939A1 (ja) * | 2014-09-25 | 2017-04-27 | 三菱電機株式会社 | イオン注入装置 |
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